Extended Pressure SEM
JEOL has introduced a new scanning electron microscope (SEM) with expanded pressure range, large specimen chamber and high resolution for imaging and characterizing a wide variety of sample types and sizes. The JSM-IT300LV is the latest addition to JEOL's series of tungsten low vacuum SEMs. This instrument builds upon the platform of the company's InTouchScope, an analytical SEM with intuitive touchscreen control, and the high-performance analytical SEM, the JSM-6610LV.
The JSM-IT300LV extends vacuum pressure range to 10 to 650 pA, more than twice that of earlier models. In low-vacuum mode, this capability enhances SEM imaging versatility for samples that are wet, oily, outgas excessively or are non-conductive without pretreatment.
A highly customizable SEM, the JSM-IT300LV features multiple ports for analytical attachments such as: energy dispersive x-ray spectrometer (EDS), electron backscatter diffraction (EBSD), cathodoluminescence detectors (CL), wavelength dispersive x-ray spectrometer (WDS), chamber scopes, heating/cooling substages and more. The large vacuum chamber accommodates samples up to 300 mm in diameter and 80 mm in height. The choice of multi-touchscreen operation, as well as keyboard/mouse and knob control, suit a wide variety of users. Sample navigation control, an embedded CCD camera and 5-axis stage control with fast asynchronous movement make it possible to image and analyze samples at a wide range of angles and orientations with pinpoint accuracy and location.