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Pulsed Plasma Characterization

Mon, 04/01/2013 - 9:22am

Hiden Analytical EQPThe performance of the Hiden Analytical family of plasma diagnostic tools is further advanced by integration of onboard timers for real-time pulsed plasma measurement, the fast gating controllable within the MASsoft operating program. Two timers provide gate open/close and gate increment periodicity with sub-microsecond gating resolution to just 100 nanoseconds, phasing data acquisition precisely with each individual plasma pulse.

Enabled instruments include the Hiden ESPion Langmuir-style probe for measurement of plasma ion and electron densities and energies, and the Hiden PSM and EQP quadrupole mass spectrometers for characterization of both positive and negative plasma ion species together with their abundance and their ion energies. All are supported by a range of accessories, with differential pumping options for processes operating up to 5 bar.

The ESPion probe is available in versions for operation in both RF and DC plasma, at elevated temperatures and in diverse lengths in excess of 1,000 nm. Compatible bellows-sealed Z-drives have up to 900 nm translation. The EQP and compact PSM plasma monitors share similar software, the EQP system featuring a high-definition sector-field energy filter and enery range +/- 1,000 eV. The integral electron bombardment ion source is used for neutrals/radicals measurement and for studies of electronegative species by electron attachment.

Hiden Analytical, www.HidenAnalytical.com

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