Energy-Saving Dry Pumps
Pfeiffer Vacuum has introduced the dry pumps A 100 L for flexible integration in semiconductor production facilities. These dry multistage roots pumps are suitable for clean applications. Despite their compact dimensions, the pumps provide high pumping speeds and short pump down times.
The further development, the A 100 L ES, cuts energy consumption by up to 50%. Its pumping speed is significantly higher in the low pressure range. Additional benefits include a lower final pressure and reduced noise level. In addition to energy savings, the final pressure of the A 100 L ES is reduced to 7x10-4 mbar (hPa). This opens up new potential applications requiring an enhanced pumping capacity combined with low pressure. The noise level is also reduced from 58 dB (A) to 55 dB (A).
Pfeiffer Vacuum, www.pfeiffer-vacuum.com