Edwards has introduced the iXL250Q and iXL750Q dry pumps. The new pumps, with the addition of the iXL500Q pump, cover the entire range of pump down requirements encountered in the flat panel display (FPD) and solar manufacturing market sector.
These pumps are designed to maximize substrate throughput, while minimizing power, footprint, and weight. The pumps require no maintenance between overhauls and are "Green Mode" enabled, allowing them to run at lower power during idle periods.
Time to pump down a particular volume chamber is determined by how much pumping speed is available close to atmospheric pressure. The iXL250Q, iXL500Q, and iXL750Q provide approximately 250 m3/h, 500 m3/h, and 750 m3/h pumping speed around atmospheric pressure. The iXL250Q is targeted for smaller chambers used for earlier generation FPDs, while the iXL500Q and iXL750Q are more suited to larger chamber volumes.