Cesium ion gun creates spot size of 20 µm
Wed, 02/25/2009 - 9:22am
The intense beam of cesium ions produced from the surface ionization source is highly focused and generates a spot size adjustable down to just 20 µm. The ion source assembly is compact, self-aligning and simple to replace. Beam energy is variable from 5 keV to 0.5 keV, with beam currents to 150 nA. The mounting flange is the 70 mm diameter Conflat-type flange and the unit is differentially pumped to maintain true UHV pressures.
Control of the IG-5C is via a PC-based interface allowing easy and reproducible set up. The interface controls the electrode parameters and thermal management of the ion source, and provides configuration options for both high current and small spot applications.
The beam raster can be externally driven with a minimum sweep time of 64 µsec and through a beam deflection of +/-4 mm. An internal preset raster is additionally provided for surface preparation treatments. Direct coupling with a Hiden MAXIM or EQS SIMS detector enables automated signal gating for acquisition of data and surface imaging from any pre-defined area within the total scanned surface.
Hiden Analytical, www.HidenAnalytical.com