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Pfeiffer Vacuum joins Facilities 450mm Consortium

Wed, 08/06/2014 - 11:47am

The Facilities 450mm Consortium (F450C), a partnership of leading nanoelectronics facility companies guiding the effort to design and build the next-generation 450mm computer chip fabrication facilities, has announced it has again increased in size, naming Pfeiffer Vacuum as the twelfth member company to join the consortium.

"Two of the main objectives of the F450C include improved Airborne Molecular Contamination (AMC) detection and response and increased green mode systems usage," stated Adrian Maynes, F450C program manager. "Bringing Pfeiffer Vacuum on board adds valuable expertise to help us address the goals of our key focus groups."

Pfeiffer Vacuum's advanced AMC solutions have already been tested and are ready for implementation into the next technology node. The company's expertise regarding the contaminants associated with pod systems and their direct environments will help ensure high quality and increased yield in the production of the larger and more advanced 450mm wafer. In addition, Pfeiffer Vacuum's high-efficiency pumps have been designed and engineered specifically for the 450mm infrastructure—complete with advanced leak detection—further enabling the environmental sustainability of 450mm facilities.

"All of our vacuum pumps, systems and leak detectors are developed with sustainability in mind," said Oliver Mayfarth, market manager semiconductor at Pfeiffer Vacuum. "We are excited to be aligned with the F450C to ensure that 450mm technology leaves little footprint and is developed in the most cost-effective manner."

Facilities 450mm Consortium

Source: Pfeiffer Vacuum

 
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