Advertisement
Award Winners
Advertisement

Bringing high-level SEM to a wider audience

Mon, 07/27/2009 - 9:00am

Magellan XHR SEM2009 R&D 100 Winner

The Magellan XHR SEM marks an attempt by FEI Company, Hillsboro, Ore., to make sub-nanometer scanning electron microscopy (SEM) resolution accessible to non-experts and without restrictions on samples or difficult operational requirements—constraints that have previously limited the utility and acceptance of other high resolution systems. The Magellan XHR SEM images samples at very low beam energies, avoiding distortions otherwise caused by the beam penetrating into the material below. The instrument’s low-voltage operation allows it to provide detailed images down to < 0.9 nm of complex external 3-D surfaces. The Magellan features integrated new electron optical elements and proprietary electron gun technology that offer 10 times the current stability of cold field emission guns. The technology is based on a Schottky emission gun, but features better energy spread (< 0.2 eV) than cold field emission guns. In addition, this SEM has a five-axis piezo-ceramic stage and a configurable analytical chamber. The stage accommodates large samples or multiple smaller samples.

Technology
Scanning electron microscope

Developer
FEI Company

Award Year

2009

Organization

FEI c/o MindWrite
FEI Co.

Developers

Sandy Fewkes
Trevor Dingle (Primary)
Caroline van der Hart (Primary)
Sander Henstra (Primary)
Advertisement

Share This Story

X
You may login with either your assigned username or your e-mail address.
The password field is case sensitive.
Loading