UNCD Wafers – Diamond MEMS 101

Posted In: Materials Processing | Materials Science | Thin films | Material Science | Materials | Materials

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UNCD Wafers – Diamond MEMS 101

Processing UNCD for incorporation at wafer scale into devices uses the same equipment as for processing silicon (Si). Patterning of UNCD may be done via a hard mask gas etching (see recipe on next page). Diamond windows may be created by backside etching the silicon from the UNCD Wafer. The following UNCD property data provides some starting points for creating devices using UNCD wafers.

A guide to creating a MEMS device from diamond

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