Edwards introduced the new iXL line of dry vacuum pumps. The first member of the family, the iXL 500, is one of the most compact and efficient pumps in its class. It is designed primarily for load lock applications in solar cell and flat panel display manufacturing where high gas throughputs and fast pump down times are crucial.
The iXL 500, which measures only 1186 X 517 X 966 mm, offers a pumping speed of 1800 m3h-1 while consuming only 7kW of power. Its low intertia booster shortens load lock evacuation times with faster more efficient pumping at higher inlet pressures. The system’s maintenance free design uses long lasting oil lubrication and eliminates the shaft seal by enclosing the motor within the vacuum. For multiple iXL 500 pumps on a single chamber, Edwards offers multi-pump systemization—a pre-configured system with integrated power distribution, control, and EMS to make hook-up simple and fast. The iXL 500 features intelligent monitoring and is fully compatible with the FabWorks network system.
Edwards Vacuum, www.edwardsvacuum.com
