High Speed, Sub-micron Positioning, Voice Coil Stages
Sub-micron, 150 nanometer positioning resolution, voice coil stages are compact, can be used as a horizontal or vertical axis, and are low cost. The high speed, 10 mm travel, Equipment Solutions’, VCS-10H Voice Coil Stage features an integrated non-contact optical and/or digital position feedback sensor for 200 nanometer repeatability. The low moving mass, voice coil stage is ideal for: optical focusing and testing, scanning microscopy, medical, semiconductor, circuit board assembly, and micro manufacturing and machining applications.
Equipment Solutions, Inc.
461 East Evelyn Ave.
Sunmjyvale, CA, 94086
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