ABRT Series Rotary Air-Bearing Stage

Aerotech's ABRT series rotary air-bearing stages provide 360-degree continuous travel with resolution to 0.027 arc sec. Velocity stability and error motion performance are exceptional. Payload capacity is up to 69 kg due to the outstanding radial and axial stiffness. The ABRT is designed to meet the exacting requirements of DVD mastering, wafer inspection, high precision metrology applications, X-ray diffraction systems, optical inspection and fabrication, and MEMS/nanotechnology device fabrication. The ABRT design features large air-bearing surfaces and innovative preloading for high stiffness and load capacity. The resultant performance is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance.

Aerotech
101 Zeta Dr.
Pittsburgh, PA, 15238