Ultra-High-Resolution Imaging of Non-Conductive Samples
The new ULTRA plus combines the unique detection capabilities of the proven ULTRA GEMINI series FE-SEM and a revolutionary charge compensation (CC) system for imaging of most critical non-conducting samples. The fully automatic charge compensator can be used in conjunction with all integrated detectors including EsB, Inlens, AsB and chamber mounted Everhart Thornley detector. For the first time non-conductive samples can be investigated in the ULTRA not only under low-voltage imaging conditions, but also at high voltage and high probe current. Visit us at PITTCON 2008 booth #5447.
Carl Zeiss SMT Inc. One Corporation Way Peabody, MA, 01960
