IDP-3 High Performance Dry Scroll Vacuum Pump
The smallest scroll pump on the market today, the innovative IDP-3 brings the proven benefits of dry scroll technology to applications where vacuum performance, pump size, and environmental concerns are critical. Its small size, low noise, and low power consumption allow easy integration into OEM systems. IDP-3 provides affordable oil-free vacuum for a wide variety of applications from analytical instrumentation and high-energy physics to semiconductor fabrication and industrial processing.
Varian Associates, Inc.
Semiconductor Equipment
811 Hansen Way, Unit B-111
Palo Alto, CA, 94304
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