Mikropack GmbH, a division of Ocean Optics, Dunedin, Fla., has released the spectroscopic ellipsometer SpecEL-2000. This compact (52 x 33 x 24 cm) bench-top tool is designed for thin-film measurement on flat samples like wafers or glass plates, and for precise measurements of layer thickness, refractive index, or absorption or components ratio.
Depending on the layer and substrate material it is possible to measure the thickness of thin-films in a range of 1nm up to about 5µm.
A corresponding software suite offers researchers/engineers a suite of modeling approaches, such as Cauchy, Drude, OJL, and Tauc-Lorentz.
