Vistec
Lithography, Inc. announced today that Yale University, New Haven,
Connecticut, selected Vistec's EBPG5000plus electron-beam lithography system for
its future nanotechnology research programs. As part of the Yale Institute for
Nanoscience and Quantum Engineering, it will enhance the effectiveness of
research and education at Yale in emerging nanotechnology and will encourage
multidisciplinary research involving Yale faculty, its students, and associated
world-wide research partners.
The Yale EBPG5000plus represents the continued development of the highly
successful EBPG product series. The high performance lithography system is based
on reliable and well-proven system architecture. With further enhancements in
resolution, noise reduction and beam stability, Yale's Vistec EBPG5000plus is
set to generate structures to less than 8nm on substrates up to 150mm in
diameter, including fragments and special substrates. Its electron-optical
column (TFE source) is rated for acceleration voltages of 20, 50, and 100kV. The
system is equipped for true 100kV / 1mm performance under regular
electron-optical conditions with a wide current capability for high throughput
applications. The pattern generator operates at up to 50MHz. The system
incorporates an interactive graphical user interface (GUI) that provides ease of
use for diverse, multiuser, university type environments.
"The acquisition of the Vistec EBPG5000plus will enable the Yale research
community to explore the expanding field of nanotechnology with a
state-of-the-art electron-beam lithography patterning system. We will utilize
the system for a wide variety of applications including Applied Physics,
Electrical Engineering and Bio-technology. The Vistec system will allow Yale to
remain at the forefront of nanotechnology today and well into the future", said
Dr. Michael Rooks, Facilities Director of the Yale Institute for Nanoscience and
Quantum Engineering. "The EBPG system will provide the Yale community with not
only high quality nanolithography patterning, but with high flexibility and user
friendliness for our various multidisciplinary activities. Vistec's system is
perfect for our nanotechnology requirements."
"Vistec is pleased to be associated with Yale University. We look forward to
our co-operation with Yale's leading edge nanotechnology researchers and their
programs", noted Rainer Schmid, General Manager Vistec Lithography, Inc.
"Vistec's association with Yale and its electron-beam research scientists will
hopefully lead to further software and hardware enhancements for our highly
successful EBPG series."
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