Oxford Instruments Secure Another Order for Ion Beam Etch and ALD Tools from KAUST

Posted In: Materials

Wednesday, October 7, 2009

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These tools will also equip KAUST's Nanofabrication Core research facility, and add to the initial order for key Oxford Instruments Plasma Technology (OIPT) systems that included several PlasmalabSystem100 tools for RIE and ICP etch, and PECVD; and a FlexAL atomic layer deposition tool.

Prof Tony Eastham, Director of Laboratories at KAUST comments, "As the need for equipment in our new Nanofabrication Core Lab increased, we decided to extend our order with Oxford Instruments. The scope and performance of OIPT tools for nano-material fabrication made them the natural choice for our requirements in etching, deposition and growth."

Mark Vosloo, Sales Director for OIPT welcomes the latest orders, "Earlier this year we were extremely pleased to receive our first multiple-system order from KAUST University, and to be involved with such a large and important research institute from the start. This second order from KAUST confirms that OIPT tools are the systems of choice for this important Saudi Arabian facility, as well as our other major customers worldwide."

Oxford Instruments has extensive experience in supplying multi-system installations to both the academic and industrial sectors where the wide range and strength of process capabilities offered make OIPT a natural choice. With thirteen Oxford Instruments systems now being installed in the KAUST research facility, the company will have another prestigious showcase for its tools.

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