Wednesday, October 7, 2009
These tools will also equip KAUST's Nanofabrication Core
research facility, and add to the initial order for key Oxford
Instruments Plasma Technology (OIPT) systems that included several
PlasmalabSystem100 tools for RIE and ICP etch, and PECVD; and a
FlexAL atomic layer deposition tool.
Prof Tony Eastham, Director of Laboratories at KAUST comments,
"As the need for equipment in our new Nanofabrication Core Lab
increased, we decided to extend our order with Oxford Instruments.
The scope and performance of OIPT tools for nano-material
fabrication made them the natural choice for our requirements in
etching, deposition and growth."
Mark Vosloo, Sales Director for OIPT welcomes the latest orders,
"Earlier this year we were extremely pleased to receive our first
multiple-system order from KAUST University, and to be involved
with such a large and important research institute from the start.
This second order from KAUST confirms that OIPT tools are the
systems of choice for this important Saudi Arabian facility, as
well as our other major customers worldwide."
Oxford Instruments has extensive experience in supplying
multi-system installations to both the academic and industrial
sectors where the wide range and strength of process capabilities
offered make OIPT a natural choice. With thirteen Oxford
Instruments systems now being installed in the KAUST research
facility, the company will have another prestigious showcase for
its tools.
SOURCE