2009 R&D 100 Winner
While traditional atomic force microscopy (AFM) capacitance techniques are defined exclusively by the inherent capabilities of an AFM, the Scanning Microwave Microscopy Mode (SMM Mode) developed by Agilent Technologies, Chandler Ariz., combines the compound, complex electrical measurement capabilities of a microwave vector network analyzer with the nanoscale spatial resolution of an atomic force microscope. This measurement technology brings the sensitivity afforded by vector network analyzers for electrical test down to the size of an AFM probe. In addition to high sensitivity, SMM Mode offers calibrated measurements and large dynamic range, enabling better characterization of samples by allowing users to choose from a variety of frequencies to optimize instrument settings for material measurement with critical accuracy.
Utilizing SMM Mode, researchers have the ability to obtain quantitative data for calibrated capacitance, complex impedance, calibrated dopant density, carrier density, and carrier migration.
Technology
Scanning microwave microscopy
Developer
Agilent Technologies
