2009 R&D 100 Winner
Sample preparation in transmission electron microscopy (TEM) significantly determines the quality of the results. Two-beam instruments that combine a focused ion beam (FIB) and a scanning electron microscope (SEM) are routinely used for site-specific TEM sample preparation with high throughput and precision. However, the quality of samples produced this way is may not be sufficient for current requirements. The integrated Triple Beam Technology represented by the products NVision 40 Argon and XVision 200/300 TB has been developed by Carl Zeiss SMT, Oberkochen, Germany, and SII NanoTechnology Inc., Tokyo, Japan, to specifically meet new TEM sample standards while not losing out on the high precision and sample throughput expected by TEM customers. These all-in-one instruments comprise an ultra-high-resolution field emission SEM and FIB with a low-energy (< 1 kV) noble gas ion gun to allow gentle in situ polishing of TEM lamella. The ability to polish TEM lamella without implanting gallium ions avoid the pitfall of induced amorphous layers on the lamella, leading to greatly improved TEM images.
Technology
All-in-one microscopy instrument
Developers
Carl Zeiss SMT
SII NanoTechnology Inc.
