2008 R&D 100 Winner
Scanning probe technology has helped jumpstart the fields of biotechnology and nanotechnology by serving as the foundation for dozens of nanoscale imaging techniques, from atomic force microscopy to scanning capacitance microscopy. All of them have a need for precise nanopositioning tools.
The XY HiPER-Nap: XY High Precision Extended Range Nano Positioning System from the Univ. of Michigan, Ann Arbor, Mich., is the largest nanometric motion range positioning system now available. It also has the most best motion performance: motion resolution of < 5 nm, repeatability of < 5 nm, motion range of 10 x 10 mm, cross-axis coupling less than 50 ppm, parasitic rotations less than 100 µrad, and low sensitivity to temperature.
The double parallelogram flexure-bearing design, which is a symmetric layout of flexure constraints and rigid stages, helps isolate x-direction movements from y-direction movements, allowing the use of less expensive long-range voice coil actuators. Bi-directional isolation also lets the XY HiPER-Nap use off-the-shelf linear probes to measure displacement.Lastly, the symmetrical thermo-centric design mitigates the negative effect of temperature fluctuations.
Technology
Nanometric motion range positioning system
Developer
Univ. of Michigan
